EHP500 AMU calculator is a calculator for helping to calculate AMU k constant table of Varian ion implanter EHP500.
If you are EHP500 equipment engineer, this will be great helpful for you.
What's New in This Release:
· Fixed the problems that can't input dot on SONY CLIE and TRGpro.
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Supported operating systems:
Palm OS 3.x, Palm OS 4.x, Palm OS 5.x
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Other Software by developer «VSEA (Varian) Taiwan»:
ThermalWave Sensitivity Calculator ThermalWave Sensitivity Calculator is a general tool for semiconductor ion implantation process control and monitor.
This calculator helps to calculate the sensitivity (to implanted ion dose).
If you are process engineer, it also helps to estimate possible dose error
